GB 28275 Silicon-based MEMS fabrication technology – Standard
GB 28275: Silicon-based MEMS fabrication technology. Specification for KOH etch process
GB 28275 Silicon-based MEMS fabrication technology – Scope
This standard specifies the use of potassium hydroxide etch process performed MEMS device fabrication process requirements to be followed.
This standard applies to KOH etching process and management.
GB 28275 Silicon-based MEMS fabrication technology – Reference Standards
GB 50073-2001 clean plant design specifications
GB/T 26111-2010 micro-electromechanical systems (MEMS) technology terms
GB/T 1031-2009 Geometrical product specifications (GPS) Surface texture Profile method of surface roughness parameters and their values